Semiconductor Manufacturing

Reduce WIP on the shop floor and enforce the execution of the material route with full material traceability and genealogy at the individual lot or wafer level. Critical Manufacturing’s material model supports all types of Material-Carrier-Wafer configurations as well as single wafer tracking across equipment clusters (e.g.: multi-chamber equipment), enabling any material logical and physical operation of a semiconductor manufacturing process.

Execute experiments transparently and seamlessly, even in mass volume production. Experiment Management module supports both the Design of Experiment (DoE) and the execution.  For single wafer tracking, engineers can create multiple experiments in a single lot by assigning individual wafers to different experiment groups, which can be configured to perform any number of variations and deviations against the Process of Record (POR).

The Factory Automation module is an event-based factory-level workflow system that helps manufacturers to progressively increase their automation capabilities all the way to high automation. Automatically react to a factory level event or execute any type of short or long-running job including control of autonomous transport systems.

Manage recipes using dynamic parameter values computed with simple business rules or by an external Run-to-Run system. The Recipe Management module provides a hierarchical recipe object model to handle recipes and sub-recipes with the same or different parameters. Connect IoT, natively integrated equipment integration module, can automatically select, upload and verify recipes before lots are processed.